Research Associate

Haifei Bao

Title: Professor Associate
Subject: MEMS and microelectronics
Phone: +86-021-621744
Fax: +86-021-62524192
Address: 865 Changning Road, Shanghai,China, 200050


Associate Professor Bao Haifei received his BS degree in Semiconductor Physics and device from Liaoning University in 1991, MS degree in National lab of Integrated Optics from Jilin University in 1994, and his PhD in Physics and Electronics from Harbin Institute of Technology in 2000. In 2001 to 2002, He was a visiting scholar in the department of Mechanics in Hongkong University of Science and Technology. From 2000, he has been with the威尼斯9778官方网站, Chinese Academy of Sciences.

For many years, he mainly focuses on the characterization and measurement of MEMS surfaces and devices. For example, research of micro/nano friction was performed on Si surface and polymer surface based on Atomic force microscopy(AFM). Information storage on the PMMA film was finished with a heated cantilever/tip in AFM. A micro/nano mechanical measurement system and prototype with hardware and software was developed in AFM. Much research work was given to the design and shock and vibration measurement of accelerometer, and several measurement methods related to the characterization of accelerometer were proposed. He published more than 30 papers, and applies more than 5 patents. In 2007, He presented his oral reports on the conference of  Transducers’07 in France.


July.2004-present, Associate Prof., State Key lab of transducer Technology,威尼斯9778官方网站, Chinese Academy of Sciences,

   Micro-nano-friction analysis on organic film based on Atomic force microscopy,

Information storage on PMMA film with thermal piezoresistive cantilever-tip in a Seiko-II AFM.

Mechanical measurement and stress analysis of microstructure by optical method.

Measurement and analysis of film thickness and refractive index with spectroscopic ellipsometer and a-Stepper.

Micro-nano Mechanical Measurement System development of software and hardware based on AFM measurement technique.

Design, characterization and shock and vibration measurement of MEMS accelerometers.

Research and characterization of Centrifuge Machine.


June.2001-April.2002, Visiting scholar, Mechanics Dept. HongKong University of Science and Technology, HongKong.

Research and characterization of micro-nano friction on Si based on AFM.


June.2000-July.2002, Post Doctor, State Key lab of transducer Technology,威尼斯9778官方网站, Chinese Academy of Sciences,

Design, fabrication and measurement of microaccelerometer.

July.1995-Jan.2000, Ph.D research on amorphous Se thin film.


Ph.D Sep.1995-March.2000, Physics and Electronics, Harbin Institute of Technology.

M.S. Sep.1991-July.1994, Integrated Opto-electronics National lab. Jilin University.

B.S. Sep.1987-July.1991, Semiconductor physics and device, Liaoning University.


Especially in the new generation of silicon-based advanced electronic materials on the silicon (SOI) field, Wang Xi led the research team in the country is the most leading position, he founded the Shanghai proud of science and technology Co., Ltd. became the United States, Japan and France after the global The fourth most important SOI material research and development center.


1)HaiFei Bao, Y Wang, B Xiong, Lu, Weihua Wang, T Y Zhang,Nano-frictional Behaviors on etched silicon (100) surfaces, International Journal of Nonlinear Sciences and Numerical Simulation 3, pp523-526,2002.


2)Weiyuan Wang, Yuelin Wang, Haifei Bao, Bin Xiong, Minhang Bao, Friction and wear properties in MEMS, Sensors and Actuators A 97-98(2002) 486-491.(also published in Transuducer'012001Germany)


3)HaifeiBao, Yuelin Wang, Bin Xiong,  Deren Lu, Weiyuan Wang, Tongyi Zhang, Nano-frictional behaviors on etched silicon(100) surfaces, International journal of nonlinear sciences and numerical simulation 3, 523-526,pp523-526,2002.


4)Haifei Bao, Deren Lu, Minghao Zhao, Evaluation of the mechanical properties of the materials in MEMS using an optical profiler, Conference Volume 5774, Proc. SPIE 5774, Fifth International Conference on Thin Film Physics and Applications, 595 (December 8, 2004); doi:10.1117/12.607902


5)Jianqiang Han, Xinxin Li, Haifei Bao, Yuelin Wang, Bin Liu, Xiaohong Ge, High-yield fabrication of AFM probes with simultaneous formation of both nano-tips and cantilever, SENSORS, 2005 IEEE, Date of Conference: 30 Oct.-3 Nov. 2005 Date Added to IEEE Xplore: 13 March 2006, Conference Location: Irvine, CA, USA


6)Jianqiang Han, Xinxin Li, Haifei Bao, Guomin Zuo, Yuelin Wang, Fei Feng, Zhenyin Yu and Xiaohong Ge,AFM probes fabricated with masked–maskless combined anisotropic etching and p+surface doping, J. Micromech. Microeng.16 198–204,2006


7)Haifei Bao, Bin Liu, Xinxin Li, Friction and adhesion study of size effect and temperature effect on PMMA film by using an intergrated MEMS probe array, Asia-pacific conference of transducer and micro-nano technology, APCOT, Singapore, p115,oral.25-28,2006.(oral)

8)Zunxian Yang, Ying Yu, Xinxin L,Haifei Bao,Nano-mechanical electro-thermal probe array used for high-density storage based on NEMS technology, Microelectronics Reliability,Volume 46, Issues 5–6, May–June, Pages 805–810,2006.


9)Haifei Bao, Bin Liu and Xinxin Li ,Micro/NANO-Friction and Thermal-Mechanical Properties of Polymer Thin-Film Investigated with an Integrated SPM Probe Array, Solid-State Sensors, Actuators and Microsystems Conference, 2007. TRANSDUCERS 2007. International, Date of Conference: 10-14 June 2007, DOI: 10.1109/SENSOR.2007.4300128, Conference Location: Lyon, France. (oral)


10)Haifei Bao and Xinxin Li,A heater-integrated scanning probe microscopy probe array with different tip radii for study of micro-nanosize effects on silicon-tip/polymer-film friction, Review of Scientific Instruments 79, 033701-1-8 ,2008.


11)HaiFei Bao, Zhaohui Song, Deren Lu, Xinxin Li, A simple estimation of transverse response of high-g accelerometers by a free-drop-bar method, Microelectronics Reliability,V49,pp66-73,2009.


a Department of Electronics Science and Applied Physics, Fuzhou University, Fuzhou 350002, China

b State Key Lab of Transducer Technology,威尼斯9778官方网站, Chinese Academy of Sciences, Shanghai 200050, China

Received 28 March 2005, Revised 19 July 2005, Available online 15 September 2005

Peitao DongAuthor Vitae, Xinxin Li, Author Vitae, Heng YangAuthor Vitae, Haifei Bao, Wei Zhou, Shengyi Li, Songlin Feng,High-performance monolithic triaxial piezoresistive shock accelerometers, Sensors and Actuators A-physical, pp339-346,2008.


Book: Coauthor, Measurement technology for Micro-Nanometer Devices 10.1002/9781118717974

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