Zhaohui Song 

Title: Professor
Subject: Microelectronics and solid-state Electronics
Phone: +86-021-62511070
Fax: +86-021-62131744
Address: 865 Changning Road, Shanghai,China, 200050


Professor zhaohui Song received the M.S. degree and Ph.D. degree from Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences, in 1996 and 2000. Since 2015,she is a full professor at State Key Laboratory of Transducer Technology,威尼斯9778官方网站(SIMIT), Chinese Academy of Sciences(CAS). Her main research interest is MEMS inertial sensors. She has been authored or co-authored over 20 papers published in Jmems,Jmm,and other journals,and over 10 granted and pending patents.HONORS AND AWARDs

The Winner of National Outstanding Youth Science Foundation

CAS 100 & New Century Talents project national candidates

The Leading Talent in Shanghai

Second prize of the State technological invention award (individual ranking third) in 2012

First prize of the Shanghai Municipal Science and Technology Progress Award (technical invention)



Professor, State key laboratory of Transducer Technology ,SIMIT,CAS,2015-present

Associate professor, State key laboratory of Transducer Technology ,SIMIT,CAS,2004-2014

Postdoctoral Researcher, State key laboratory of Transducer Technology ,SIMIT,CAS,2001-2003



M.S., mechanical engineering and automation, 1996, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences

Ph.D., mechanical engineering and automation, 2000, Changchun Institute of Optics and Fine Mechanics, Chinese Academy of Sciences



1)Zhaohui Song, Teng Sun, Jian Wu, Lufeng Che ,System-level simulation and implementation for a high Q capacitive accelerometer with PD feedback compensationMicrosystem Technologies(2015)21:2233-2240

2)Wei Li, Zhaohui Song, Xiaohong Ge, Lufeng Che, Yuelin Wang, A novel self-aligned electrostatic vertical actuator using plastic deformation technology, Microsystem Technologies, 2014202):251-257

3)Wei Li, Xiaolin Li, Lufeng Che, Yuelin Wang, Zhaohui Song, Novel sandwich capacitive accelerometer with a double-sided 16-beam-mass structureMicroelectronic Engineering201411532-38

4)Zhaohui Song, Xuemeng Chen, Shusen Huang, Yuelin Wang, Jiwei Jiao,Xinxin Li, A high-sensitivity piezoresistive gyroscope with torsional actuation and axially-stressed detection, Sensors, 2003. Proceedings of IEEE,Volume 1, 22-24 Oct. 2003 Page(s):457 – 460

5)Haifei Bao, Zhaohui Song, Deren Lu,Xinxin Li. A simple estimation of transverse response of high-g accelerometers by a free-drop-bar method, Microelectronics Reliability, 49(2009)66-73

6)Xuemeng Chen, Xinxin Li, Zhaohui Song, Shusen Huang, Yuelin Wang, Jiwei Jiao, Heng Yang,Ying Zhang, A micromachined gyroscope with piezoresistance for both high performance Coriolis-effect detection and torsional vibration monitoring. Solid-State Sensors, Actuators and Microsystems, 2005. Digest of Technical Papers. TRANSDUCERS '05. The 13th International Conference on Volume 1, 5-9 June 2005 Page(s):117 - 120 Vol. 1

7)Xinxin Li, Baoluo Cheng, Yuelin Wang,Lei Gu, Jian Dong, Heng Yang, Zhaohui Song, A trench-sidewall single-wafer-MEMS technology and its typical application in high-performance accelerometers, Electron Devices Meeting, 2004.IEDM Technical Digest.IEEE International,13-15 Dec. 2004 Page(s):43 – 46

8) Menjun Jia,Xinxin Li, Zhaohui Song,Minhang Bao, Micro-cantilever

shocking-acceleration switches with threshold adjusting and ‘on’-state latching functionsJournal of Micromechanics and Microengineering, 17(2007)567-575

9)Xinxin Li,Xuemeng Chen, Zhaohui Song, etc, A microgyroscope with piezoresistance for both high-performance coriolis-effect detection and seesaw-like vibration control, JOURNAL OF MICROELECTROMECHANICAL SYSTEMS,2006,15(6):1698-1707

10)Shusen Huang,Xinxin Li, Zhaohui Song,etc, A high-performance micromachined piezoresistive accelerometer with axially stressed tiny beams, Journal of Micromechanics and Microengineering, 2005,15(5):993-1000

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